Acoustic pressure- prestressed harmonic analysis

Hello,

@peteroznewman and all

Could anyone please tell me procedure or design schematic of this paper. How can I Implement this paper in ANSYS?

Finite-element analysis of capacitive micromachined ultrasonic transducers

https://ieeexplore.ieee.org/document/1563262

In this paper, we present the results of finite-element analysis performed to investigate capacitive…


I know how to find the collapse voltage. And I know the procedure of applying prestressed condition But I am facing problem with Acoustic pressure graph.

In this paper, they have X-axis in KPa/V. What is it? I know acoustic pressure in KPa. And here I have attached ANSYS file which I have implemented. I got all result in MPa and It's huge.


Could you please help me with getting that graph? I am interested in Fig. 14 graph

Am I on right track or not? Please suggest me I tried all things but I don't where I am doing wrong.

I used ANSYS Workbench 2019 R2 academic(research) licence.

Here I have attached workbench file.

Thank you so much

Regards,

Dhruvin

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