Erik Kostson
Ansys Employee
In the piezo/mems extension there is not documentation mentioning the use of harmonic acoustics, hence it can not be guaranteed that it will work, and as I have never used it in that way via harmonic acoustics we can not help - as I said it can be done via command snippets in a harmonic acoustic analysis (this can be done and been used), and the snippets are shown in the video.

Best of luck

Erik