Yes, I have verified the geometry dimensions and the material property is not defined by me, I have taken the pure silicon from Ansys material library .
When I edit the direction of force I am getting the mentioned deformation at 100 N force, for 10 N deformation is on micrometer range
When I edit the direction of force I am getting the mentioned deformation at 100 N force, for 10 N deformation is on micrometer range 
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