Guilin Sun
Ansys Employee

Could you let me know what did you modify and then got the same error?

It can be from some settings: https://forum.ansys.com/forums/topic/error-on-lumerical-device/#latest

or it can be from your computer system. PLease restart the computer, run a similar online example, or simplify the simulation file.

Please make sure all metal materials are set to be contacts with certain voltage, even it is zero. and make sure any space or geometry has a proper material. Different from FDTD and MODE, CHARGE has no default background material and it cannot solve the equestions if the local mesh has no material.