mo_911
Subscriber

Thank you for your advice. I will try to get the initial parameters from the GDS for 3D optimization. 

I hope you can resolve the issue completely soon, but that would be fine if the initial guess for 3D optimization is close enough to the 2D optimized geometry. The initial guess is not necessarily to be exactly the same as the 2D optimized geometry if it is hard to resolve the interpolation issue.