Erik Kostson
Ansys Employee

 

 

Hi

The only thing that is perhaps a bit similar and that might be of some help, is an example in our help manual (Coupled field analysis – electrostatic-structural section) .

It is called:

2.4.8. Example: Electrostatic-Structural Analysis of a Micromirror

 

2.4. Electrostatic-Structural Analysis (ansys.com)