Kyle
Ansys Employee

Hello,

From the RCWA solver object docs (RCWA Solver - Simulation Object – Ansys Optics):

"The tangent vector field option should only be used with MESH REFINEMENT set to conformal variant 0, 1, or 2."

It looks like you are using staircase mesh refinement, please try changing that to a conformal variant option.

The polarization of the source can't be directly set in RCWA, however any incident polarization can be written in the S/P basis so these results can be used for arbitrary polarizations.