Hi Aygün,
I would suggest you to try the following:
- Decrease the autoshutoff min and increase the simulation time to make sure that the fields have decayed sufficiently enough (Simulation status should be 2 at the end of the simulation).
- Increase the number of PML layers. You may rerun the simulation with "steep angle" PML profile.
- Add a index monitor to the simulation and make sure that all the layers are properly resolved.
Regards,
Amrita