July 25, 2023 at 6:36 am
Swathi V. V.
Ansys Employee

Hi ,

Please refer to the following user manaul page to know how rate of reaction is computed for surface reaction. Please refer to the equation 7-54.in 7.1.2. Wall Surface Reactions and Chemical Vapor Deposition (ansys.com)

C(A) is the Molar concentration of surface absorbed gaseous species on the wall