Hello,
In the geometry tab, make sure the monitor is centered and set the x span and y span to match the span of the simulation region.
Please see the video to understand more about mode sources:
Optical Sources – Mode Source – Introduction & Applications – Ansys Optics
Optical Sources – Mode Source – Setup & Tips – Ansys Optics
Monitors:
Monitors – Introduction and Common Settings – Ansys Optics
Monitors – Frequency-Domain Field – Results & Applications – Ansys Optics
Monitors – Frequency-Domain Field – Setup & Tips – Ansys Optics
And yes, the monitors should be larger than the waveguide to capture the entire light distribution around the waveguide boundary.
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Thnak you