Guilin Sun
Ansys Employee

It has only one size parameter as replied before. You can call it as sigma.

 it stops at the level of defining the type (gaussian /erfc): since the doping is additive, you can use a uniform doping to level the small gaussian tail. I am noste sure if you can use the opposite doping to reduce it.

Ussually there is backgroud doping. So small change of doping at the edge should not change the result significantly. You can test and verify it. There are other errors in simulation which can be larger than this small doping differece.