I missed one thing in my test.
The size of the pyramid structure in my latest reply is 0.5 um while the size of the first pyramid that occurs a large gap in the result of RCWA is 5 um.
When the pyramid size increases, it starts to show a difference between the FDTD and RCWA.
I think the thing is that an increase in the pyramid size requires a lot of resources to get accurate results.
I sincerely apologize for my mistake.
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