Optical

Optical

Adding roughness (LER) to a contact hole

    • Miller Testing
      Subscriber

      I was trying to add roughness (LER) to a contact hole:

       

      # add silicon substrate
      addrect;
      set("name","substrate");
      set("x",0);
      set("y",0);
      set("z",0);
      set("x span",10e-6);
      set("y span",10e-6);
      set("z span",1e-6);
      set("material","Si (Silicon) - Palik");
      
      # add contact hole
      addcircle;
      set("name","hole");
      set("x",-2e-6);
      set("y",-2e-6);
      set("z",0.5e-6);
      set("radius",0.05e-6);
      set("material","Air");
      
      # replicate contact holes along x direction
      selectall;
      replicatexy(11,1,0.2e-6,0);
      
      # delete unwanted holes
      selectpartial('hole');
      delete;
      
      # replicate contact holes along y direction
      selectall;
      replicatexy(1,11,0,0.2e-6);
      
      # delete unwanted holes
      selectpartial('hole');
      delete;
      
      

       

      # add roughness to all holes

      selectall;

      addroughness(

      "x",

      0,

      "y",

      0,

      "z",

      0,

      "r",

      5e-9,

      20e-9,

      "seed",

      randomint(100000)

      );

       

      However I get this error:

      - replicatexy is not a valid function or variable name

      - line 15: matrices can not exceed 8 dimensions

      Can someone help me to solve with this problem? 

      Thank you.

       

    • Ashish Khemka
      Ansys Employee

      Hi,

      Please see if the following link helps:

      Tips for adding surface roughness to structures – Ansys Optics

      Regards,

      Ashish Khemka

      • Miller Testing
        Subscriber

        Thank you very much, Ashish Khemka.

        I can add the roughness based on the link that you shared to me.

        But I want to add a beam structure and i want to implement the roughness on the surface area of the block by using script. 

        If its not troubled you. Can you help and show me how to do that?

         

        Thank you very much.

         

        Best regards,

        Miller

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