Photonics

Photonics

Adding roughness (LER) to a contact hole

    • Miller Testing
      Subscriber

      I was trying to add roughness (LER) to a contact hole:

       

      # add silicon substrate
      addrect;
      set("name","substrate");
      set("x",0);
      set("y",0);
      set("z",0);
      set("x span",10e-6);
      set("y span",10e-6);
      set("z span",1e-6);
      set("material","Si (Silicon) - Palik");
      
      # add contact hole
      addcircle;
      set("name","hole");
      set("x",-2e-6);
      set("y",-2e-6);
      set("z",0.5e-6);
      set("radius",0.05e-6);
      set("material","Air");
      
      # replicate contact holes along x direction
      selectall;
      replicatexy(11,1,0.2e-6,0);
      
      # delete unwanted holes
      selectpartial('hole');
      delete;
      
      # replicate contact holes along y direction
      selectall;
      replicatexy(1,11,0,0.2e-6);
      
      # delete unwanted holes
      selectpartial('hole');
      delete;
      
      

       

      # add roughness to all holes

      selectall;

      addroughness(

      "x",

      0,

      "y",

      0,

      "z",

      0,

      "r",

      5e-9,

      20e-9,

      "seed",

      randomint(100000)

      );

       

      However I get this error:

      - replicatexy is not a valid function or variable name

      - line 15: matrices can not exceed 8 dimensions

      Can someone help me to solve with this problem? 

      Thank you.

       

    • Guilin Sun
      Ansys Employee

      I am not sure where you get "replicatexy" as it is not listed in the script commands officially:

      https://optics.ansys.com/hc/en-us/articles/360034923553-Lumerical-scripting-language-Alphabetical-list

      Neither "randomint".

      Please check where is it from.

      "- line 15: matrices can not exceed 8 dimensions"

      I do not know which line 15 but as the message says, a matrix cannot have more than 8 dimensions, if you defined it.

       

      For randomness, please refer to the structure groups in the Object Library.

    • Miller Testing
      Subscriber

      Dear Guilin Sun,

       

      Thank you for your response. I apologize for the lack of clarity in my programming language. 

      Actually, I want to add a beam structure and i want to implement the roughness on the surface area of the block by using script. 

      If its not troubled you. Can you help and show me how to do that?

       

      Thank you very much.

       

      Best regards,

      Miller

    • Guilin Sun
      Ansys Employee

      Please check the Object Library for some randomness. Also check the following articles:

      Tips for adding surface roughness to structures – Ansys Optics

      sroughness - Script command – Ansys Optics

       

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