Electromagnetic field analysis of MEMS sensors.

- October 16, 2023 at 6:41 pm
  
  ty_jpn
  Subscriber
  
  What methods can be used to analyse the electrostatic field of comb electrode structures used in capacitive MEMS accelerometers?
- October 17, 2023 at 8:44 am
  
  Erik Kostson
  Ansys Employee
  
  Hi
  Perhaps this helps (example 2-4-5):
  2.4. Electrostatic-Structural Analysis (ansys.com)
  If you are not able to open the links, refer to this forum discussion: How to access the ANSYS Online Help
  Guidelines for Posting on Ansys Learning Forum
  Hope that helps
  All the best
  Erik

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