February 11, 2022 at 9:50 amthechiyunSubscriber
I want to do a computational analysis of the etch chemistry to establish the required composition of the plasma.
ex: use the CF4 for etching of Si, finding another chemical material to see if it can replace/break down CF4February 11, 2022 at 10:43 amRobAnsys EmployeeOK. What do you actually want to model?
February 11, 2022 at 10:15 pmthechiyunSubscriberI want to use the PFC and HFC gases to do a calculation so I think I need some information like rate equation, mechanisms and etc.
I want to know like how complete is your database with the chemkin.
February 14, 2022 at 3:03 pmRobAnsys EmployeeHaving checked with a colleague he didn't find any HFC chemistry referred to in the documentation. I suspect you'll need to find a detailed reaction scheme in the literature.
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