Fluids

Fluids

establish the required composition of the plasma

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    • thechiyun
      Subscriber

       I want to do a computational analysis of the etch chemistry to establish the required composition of the plasma. 

      ex: use the CF4 for etching of Si, finding another chemical material to see if it can replace/break down CF4

    • Rob
      Ansys Employee
      OK. What do you actually want to model?
    • thechiyun
      Subscriber
      I want to use the PFC and HFC gases to do a calculation so I think I need some information like rate equation, mechanisms and etc.
      I want to know like how complete is your database with the chemkin.
    • Rob
      Ansys Employee
      Having checked with a colleague he didn't find any HFC chemistry referred to in the documentation. I suspect you'll need to find a detailed reaction scheme in the literature.
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