反射繞射光模擬結果有些結果二階繞射比一階繞射能量高
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老師您好:
我想透過觀察繞射產生的繞射影像來看看不同CD下對繞射影像的影響。
我測試了 CD = 0.1um 0.15um 0.2um 0.25um 0.3
但我發現 CD = 0.15um 和 0.3um時二階繞射比一階繞射能量高，想知道這是為什麼呢？
因為在我的認知中一階的能量會比二階高。
以下是我的模擬架構和參數，我採用Gaussion beam 54.096度入射。40個gratting 週期
FDTD有達到收斂。
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老師您好:
我投遠場的腳本是參考以下連結:
https://optics.ansys.com/hc/en-us/articles/360042260213-Simplified-microscopic-imaging
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