Material Removal Rate

- June 15, 2023 at 6:11 pm
  
  Atefeh Sadrimofakham
  Subscriber
  
  Hello eveyone. I am working on wafer simulation in CMP process. Do you know how we can see/gain the results for material removal rate (MRR)?
- August 14, 2023 at 9:18 pm
  
  Atefeh Sadrimofakham
  Subscriber
  
  In Chemical Mechanical Polishing process, we polish a Silicon Oxide/Nitride wafer on the Polyurthane pad. The ununiformity on the wafer surface will be decreased and flattened based on this process. So, I wonder if is there any possibilty to calculate the amount of the Material Removal Rate from the wafer surface? (It is something like erosion.) https://en.wikipedia.org/wiki/Chemical-mechanical_polishing. Here is more information about the CMP process.
- August 15, 2023 at 7:50 am
  
  Praneeth
  Ansys Employee
  
  Hi Atefeh,
  Please provide the Ansys tool name that you wish to use to help us serve you better.
  Best regards,
  Praneeth.
- August 15, 2023 at 5:24 pm
  
  Atefeh Sadrimofakham
  Subscriber
  
  Ansys Fluent
- August 17, 2023 at 8:58 am
  
  Essence
  Ansys Employee
  
  Hello,
  Did you try using the Ansys Rocky which can be coupled with Ansys Fluent for your application?

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