General Mechanical

General Mechanical

MEMs micro-mirror simulation

    • Abhijit abhattacharya
      Subscriber

      Hello,

      What will be the best Ansys solver or method to simulate & extract "Quality-Factor" of a MEMS micromirror structure (clamped double-sided at its shorter sides and the actuation mechanism is electrostatic).

      Kindly share your comments/suggestions and if some documentation or tutorial-examples available.

      Regards

       

    • Erik Kostson
      Ansys Employee

       

       

      Hi

      The only thing that is perhaps a bit similar and that might be of some help, is an example in our help manual (Coupled field analysis – electrostatic-structural section) .

      It is called:

      2.4.8. Example: Electrostatic-Structural Analysis of a Micromirror

       

      2.4. Electrostatic-Structural Analysis (ansys.com)

       

       

    • Abhijit abhattacharya
      Subscriber

      Thanks, that helps. 

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